大咖动态
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WAT<span style="font-family:宋体;">：</span>Wafer Acceptance Test
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CP<span style="font-family:宋体;">：</span>Chip Probing
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PCM<span style="font-family:宋体;">：</span>ProcessControl Monitor
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PCM=WAT，国内以前叫PCM<span style="font-family:宋体;">，境外叫</span>WAT<span style="font-family:宋体;">，名字不一样，事情是同样的。现在</span>PCM<span style="font-family:宋体;">比较少用，基本都用</span>WAT<span style="font-family:宋体;">。</span>PCM<span style="font-family:宋体;">或</span>WAT<span style="font-family:宋体;">是为了工艺监控而设定的一种测试，测试结构（</span>testkey<span style="font-family:宋体;">）都是为了工艺监控而特定设计的。早期工艺，这些测试结构都要占据几个芯片位置，一般是</span>9<span style="font-family:宋体;">个或</span>5<span style="font-family:宋体;">个芯片位置，随着工艺复杂，先进，芯片位置极其宝贵，这些测试结构就被安排在了无用的切割道中。</span>CP<span style="font-family:宋体;">是测试晶圆，测试芯片的性能。</span>
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回复：【WAT，CP，PCM 是些什么意思？】 | 问答
2020-10-14
杜志国
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