大咖动态
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<span style="font-family:宋体;">首先检查</span>mapping<span style="font-family:宋体;">，有规律、有划痕之类（是</span>foundry<span style="font-family:宋体;">的问题的可能性偏大），另外就是要看</span>OS<span style="font-family:宋体;">是在第一次测试</span>Fail<span style="font-family:宋体;">（来料问题可能性大），还是第二次测试</span>Fail<span style="font-family:宋体;">（测试问题）。之后这些信息确认了，做</span>OBIRCH<span style="font-family:宋体;">，发现亮点。首先按你想确认的，是</span>Bumping<span style="font-family:宋体;">或者晶圆工艺问题。</span>
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Bumping<span>参考大家说的，去掉锡球再测量一下电性</span>/IV<span style="font-family:宋体;">（排查</span>Bump<span style="font-family:宋体;">连接性？）。然后再去掉</span>PI<span style="font-family:宋体;">，根据亮点位置一层一层</span>delayer<span style="font-family:宋体;">观察</span>metal<span style="font-family:宋体;">层（</span>RDL<span style="font-family:宋体;">有问题也会有亮点，</span>OM<span style="font-family:宋体;">应该能观察到吧？）。</span>Delayer<span style="font-family:宋体;">下来，除了发现烧伤，一般发现的晶圆问题都在</span>Metal 1<span style="font-family:宋体;">层</span><span class="Apple-converted-space"> </span>CNT<span style="font-family:宋体;">连接异常或者是金属桥接（异常小可以配合</span>SEM<span style="font-family:宋体;">观察）。另外</span>delayer<span style="font-family:宋体;">是平面研磨，也可以尝试在亮点竖切（</span>FIB<span style="font-family:宋体;">）。对于</span>bumping-<span style="font-family:宋体;">特别注意的</span>failure mode<span style="font-family:宋体;">：一个是</span>seal ring<span style="font-family:宋体;">结构跟</span>bumping<span class="Apple-converted-space"> </span><span style="font-family:宋体;">制程的</span>window<span style="font-family:宋体;">，</span><span style="font-family:宋体;">第二要看</span>plasma induced<span class="Apple-converted-space"> </span><span style="font-family:宋体;">的</span>defect<span style="font-family:宋体;">，</span><span style="font-family:宋体;">第三特别注意</span>seed layer,<span class="Apple-converted-space"> </span><span style="font-family:宋体;">第四是界面的污染和</span>Delam<span style="font-family:宋体;">。如果是</span>EEPROM<span style="font-family:宋体;">的</span>wafer<span style="font-family:宋体;">，</span><span class="Apple-converted-space"> </span>bump x-ray inspection<span style="font-family:宋体;">要控制。</span>
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回复：【WLCSP FT中出现的一些失效问题】 | 问答
2020-09-17
杜志国
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